标题:
Capacitive micromachined ultrasonic transducer and ultrasonic imaging apparatus
当前申请(专利权)人:
HITACHI, LTD.
发明人:
IKEDA, TEIICHIRO | TANAKA, HIROKI | MACHIDA, SHUNTARO
简单同族:
CN101669375A | CN101669375B | CN103350064A | CN103350064B | EP2152024A1 | EP2152024A4 | JP5087617B2 | JPWO2008136198A1 | US20100137719A1 | US9636707 | WO2008136198A1