标题:
Capacitive micromachined ultrasonic transducer (cMUT) and its production method
当前申请(专利权)人:
OLYMPUS CORPORATION
发明人:
ADACHI, HIDEO | WAKABAYASHI, KATSUHIRO | YASUNAGA, SHINJI | NEMOTO, KIYOSHI | MURAKAMI, MIYUKI
简单同族:
EP1781067A1 | EP1781067A4 | EP1781067B1 | JP2006050314A | JP2006050314A5 | JP4746291B2 | US20070161896A1 | WO2006013717A1