标题:
Substrate moving unit for deposition, deposition apparatus including the same, method of manufacturing organic light-emitting display apparatus by using the deposition apparatus, and organic light-emitting display apparatus manufactured by using the method
授权日:
1900-01-01
公开(公告)号:
US20140349428A1
申请日:
2013-12-06
公开(公告)日:
2014-11-27
当前申请(专利权)人:
SAMSUNG DISPLAY CO., LTD.
发明人:
HAN, JEONG-WON
简单同族:
CN104183796A | CN104183796B | JP2014227604A | JP6293544B2 | KR1020140139360A | KR102081282B1 | TW201444991A | TWI606128B | US20140349428A1 | US8936956
简单同族成员数量:
10
简单同族被引用专利总数:
12
诉讼案件数:
0
法律状态/事件:
授权 | 权利转移