Method of measuring superficial chemical species and apparatus for measuring the same
授权日
2012-08-29
公开(公告)号
EP1719448B1
申请日
2005-02-22
公开(公告)日
2012-08-29
当前申请(专利权)人
WASEDA UNIVERSITY
发明人
SOUTA, T., C/O SCHOOL OF SCIENCE AND ENGINEERING | AIZAWA, KATSUO, C/O TOKYO MEDICAL UNIVERSITY | NAKAMURA, A., C/O SCHOOL OF SCIENCE & ENGINEERING | KAGEYAMA, S., C/O SCHOOL OF SCIENCE & ENGINEERING | OHTSUBO, SHINYA, C/O RESARCH PROMOTION DIV. | ICHIKAWA, FUMIHIKO