Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
授权日
1900-01-01
公开(公告)号
US20110168986A1
申请日
2011-01-10
公开(公告)日
2011-07-14
当前申请(专利权)人
SAMSUNG DISPLAY CO., LTD.
发明人
LEE, YUN-MI | KIM, SANG-SOO | JO, CHANG MOG | PARK, HYUN-SOOK