Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method
授权日
2014-12-30
公开（公告）号
US8921831
申请日
2010-07-15
公开（公告）日
2014-12-30
当前申请（专利权）人
SAMSUNG DISPLAY CO., LTD.
发明人
KIM, JONG-HEON | PARK, HYUN-SOOK | RYU, JAE-KWANG | KANG, HEE-CHEOL | OH, JI-SOOK
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